On-Wafer Evaluation of MEMS Devices

Testing at Earliest Stages in Development Can Help Lower Costs of Microelectromechnaical Systems.

By Mitsuhiro Nakamura
Agilent Technologies, Inc.

Recently, various devices using MEMS technology such as pressure sensors, accelerometers, and RF MEMS have been commercialized. Additionally, new devices such as silicon microphones, are rapidly evolving. The MEMS market started with the automotive industry and has been expanding to consumer products such as cellular phones.

This MEMS market expansion also applies pressure on manufacturers to lower their costs per device. However there are few opportunities for cost reduction. The limiting factors include:

• Low yields due to the precision process
• Slow throughput due to application of the physical stimulus.

A recent study (item 1 in the Appendix) estimates that 80% of the total production cost is attributed to the device packaging process and how defective chip inflow to the packaging process can contribute to cost increases. Therefore, we will discuss how to evaluate MEMS elements at the on-wafer stage in order to lower the total production cost.

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The Continuing Evolution of Mechatronics

It began as the integration of mechanisms with electronics. Since then, mechatronics has evolved, and for all practical purposes, includes nearly every engineering discipline.

By Andy Urda, Director Channel & Industry Marketing

Yaskawa Electric

In 1953, Yaskawa Electric began its active role in advancing technology in the field of motion control when the company introduced its servo motor line, the Minertia® Motor (named for minimum inertia). These servomotors made rotation exact to the proportion of conduction. Due to their very low inertia, they handle extremely fast starts and stops. Originally, they were applied to electrical actuators for the control of mechanical arms. Today, they are also found in many industrial automation applications. Yaskawa’s signature phrase of the late 1960’s and early 1970’s was “Mochintrol,” which was created from the combination of motor, machine, and control. Mochintrol became a registered trademark for the company in 1971. Read more